MIDEM 2007 Conference
D.Strle, University of Ljubljana, Faculty of Electrical Engineering, Tržaška 25,
Ljubljana, Slovenia
V.Kempe, SensorDynamics AG, Schloss Eybesfeld 1e, A-8403 Graz- Lebring, Austria
MEMS Based Inertial Systems
OUTLINE:
- Overview of inertial sensing and its applications
- Short history of Giroscopes
- Inertial MEMS sensors (accelerometer, Gyro )
- MEMS accelerometers: Theory, design, examples, performances
- MEMS Gyroscopes: Theory, design, examples, performances
- MEMS Fabrication process principles
- MEMS packaging
- System development
- Demonstration
Workshop on Electronic Testing
MIDEM Conference 2007 homepage is edited by the
Laboratory of
Photovoltaics and Optoelectronics,
Sybille Hellebrand, Universität Paderborn (D)
Zebo Peng, Linköping University (S)
Paolo Prinetto, Politecnico di Torino (I)
Michel Renovell, LIRMM (F)
Hans-Joachim Wunderlich, Universität Stuttgart (D)
Faculty of Electrical Engineering
University of Ljubljana