Society for Microelectronics, Devices and Materials, Ljubljana, Slovenia |
MIDEM 2008 |
Workshop Chair:
Miran Mozetič, Jožef Stefan Institute, Slovenia
Workshop Program Committee:
Andre Ricard, CPAT, Universite Paul Sabatier, Toulouse, France Giorgos A. Evangelakis, University of Ioannina, Ioannina, Greece Francisco Tabares, Laboratorio National de Fusion, CIEMAT, Madrid, Spain Slobodan Milošević, Institut za Fiziku, Zagreb, Croatia Marianne Balat-Pichelin, PROMES-CNRS laboratory, Font-Romeu Odeillo, France Jacek Jagielski, Institute for Electronic Materials Processing, Warszawa, Poland Peter Panjan, Jožef Stefan Institute, Ljubljana, Slovenia
Scope:
The workshop is devoted to recent advances in plasma technologies and application in nanoelectronics, biochemistry and biomedicine. Attendance of researchers active in plasma processing of materials and plasma synthesis of nanomaterials is foreseen.
Topics:
1. Highly dissociated cold plasma 2. Plasma characterization 3. Surface analytical methods 4. Synthesis of nanomaterials 5. Functionalisation of organic materials 6. Selective etching of hydrogenated carbon films 7. Super-hydrophilic and super-hydrophobic materials 8. Application in nanoelectronics, biochemistry and biomedicine |
Workshop: Advanced Plasma Technologies |